Publications

Conference Publications

  1. Duenner A, Cullinan MA. Passive Semiconductor Wafer Alignment Mechanism to Support In-line Atomic Force Microscope Metrology. ASPE 2015 Annual Meeting. Austin; 2015.
  2. Yao T-F, Duenner A, Cullinan MA. In-line, Wafer-Scale Inspection in Nano-Fabrication Systems. ASPE 2015 Annual Meeting. Austin; 2015.
  3. Ladner I, Duenner A, Cullinan MA. Carbon Nanotube Growth Force Detection on Multi-Axis MEMS Sensor with Integrated Microheater. ASPE 2015 Annual Meeting. Austin; 2015.

Provisional Patent Applications

  1. Cullinan MA, Duenner AC. SYSTEMS AND METHODS FOR PASSIVE ALIGNMENT OF SEMICONDUCTOR WAFERS. 62/250,468. Patent Pending.
  2. Cullinan MA, Duenner AC, Yao T-F. METROLOGY DEVICES FOR RAPID SPECIMEN SETUP. 62/250,214. Patent Pending.